Gyroscope MEMS Chip from Bandung

An article from Widodo S. W. - Bandung Flying Club

Gyroscope MEMS Chip from Bandung
Gyroscope MEMS Chip from Bandung
Gyroscope MEMS Chip from Bandung
Gyroscope MEMS Chip from Bandung
Gyroscope MEMS Chip from Bandung
Gyroscope MEMS Chip from Bandung

It begins In 2013, from helping Tris Dewi Indraswati work on her doctoral dissertation on the design of Integrated Circuit (IC) gyroscope sensors using MEMS (Microelectromechanical Systems) technology in the ITB electrical department.

Because of Microelectronics Lab facilities at ITB was only able to work on processes up to 100 microns, we collaborated with TU Delft Semiconductor Lab (Netherlands), through help of Prof. Adrian Venema. The facilities at Delft's TU allowed the design of a 2 micron chip to be achieved. The design and characterization of the gyroscope chip was carried out in Bandung while the semiconductor and packaging processing was carried out at TU Delft.

Why Gyroscope? Why use MEMS technology? With the technology and facilities available at ITB, we wanted to test whether we could complete the IC sensor design. From this experience, we will increasingly understand technical constraints and can be used as inputs for the next component research, especially those using MEMS technology.

Gyroscope became the choice of our efforts because of there was already a mathematical modeling and calculation of the MEMS gyroscope which was the Postgraduate Thesis of Tris Dewi Indraswati. Moreover, Indonesia still needs quality gyroscopes for various applications that are not readily available in the market.

Gyroscope applications, including as motion sensor, especially on the axis of rotation, which can then be combined with the control system to manage the rotational motion of the system such as drones, airplanes, ships, motion platforms, etc.

MEMS technology can also be used to make various applications other than gyroscope sensors such as accelerometer sensor, micro motor, micro turbine, and micro fluidic.

I included some photos from the research we did at the ITB PAU Microelectronics Lab in Bandung, West Java, Indonesia.